Overall introduction to miniaturization and microelectromechanical systems (MEMS); Fundamental physics of scaling in micro/nano-worlds; Overview of advanced micro/nano-fabrication materials & technologies & devices; Governing principle of physical phenomenon in micro/nano-scales, e.g. actuation, transduction, resonance, and manipulation, etc.; State-of-the-art applications of micro/nano-systems for interdisciplinary fields.

CILO-1: Students will be able to critically assess knowledge of concepts and principles on micro/nano-systems, e.g. electrostatic, piezoresistive, piezoelectric sensors and actuators. CILO-2: Students will be able to describe fundamental principles of sensing, actuation and corresponding scaling laws in MEMS. CILO-3: Students will be able to provide a comprehensive perspective of various fabrication processes and materials used in micro- and nano-fabrication, e.g. photolithography, wet and dry etching, deposition, and wafer bonding. CILO-4: Students will be able to explain the principle, design, and fabrication techniques of leading exemplary devices in the MEMS industry, e.g. LIGA process, MUMPs process, and CMOS process. CILO-5: Students will be able to design basic MEMS devices using relevant mechanical/electrical/fluidic engineering principles.