This course mainly focuses on the overall introduction to the miniaturization, fabrication, and applications of micro/nano-electromechanical systems (MEMS/NEMS). The fundamental physics and governing formulas will be introduced, along with the typical phenomenon and principle in micro/nano-scales. Overview of the advanced micro/nano-fabrication technologies, e.g. photolithography, will be introduced to describe the fabrication of advanced micro/nano-devices. Some important phenomena in micro/nano-scales will be discussed including sensing, transduction, resonance, and manipulation, etc. Finally, the State-of-the-art applications of micro/nano-systems for interdisciplinary fields such as biomedical sensing, wearable devices, and lab-on-chip systems will be covered.

CILO-1: Students will be able to describe the development of state-of-the-art MEMS/NEMS in our life. CILO-2: Students will be able to introduce the basic structures and functional materials used in MEMS/NEMS. CILO-3: Students will be able to explain the working principles of different MEMS/NEMS devices, including mechanical, acoustic, magnetic, and electric, etc. CILO-4: Students will be able to design and fabricate the MEMS/NEMS devices according to the specific applications.