This course provides an overall introduction to miniaturization and microelectromechanical systems (MEMS) with basic theoretical principles of the scaling in micro/nano-devices. Key fabrication methodology, material, and structural design of MEMS will be introduced. The state-of-the-art applications of MEMS in interdisciplinary fields will also be covered.
Intended Learning Outcomes
CILO-1: Interpret the basics of micro & nano-systems, from physical principles to preparation aspects.
CILO-2: Recognize the construction rules of Micro-electromechanical Systems for multiple applications in mechanical actuation.
CILO-3: Describe the mechanism and principle of bio/chemical trace analysis, etc.