Thin films are used in many aspects in modern technologies. This course mainly focuses on introducing the working principles of various thin film fabrication techniques, such as, thermal evaporation, sputtering, chemical vapor depositions. Physics in obtaining vacuum and/or plasma conditions as well as the applications of thin films in modern society are also going to be covered.

CILO-1: Design and conduct vacuum systems to evaluate the function of the parts on a vacuum system. CILO-2: Analyze the working mechanism of thermal evaporation, design and operate a thermal evaporation system. CILO-3: Recognize the gas discharge process, describe the structure of glow discharge and explain the working mechanism of a sputtering system. CILO-4: Use the method of Chemical vapor deposition to design and construct Chemical vapor deposition system according to the practical need. CILO-5: Identify and analyze the proper method to deposit thin films for different requirements.